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National Repository of Grey Literature 2 records found  Search took 0.01 seconds. 
Quantitative mapping of dopant in semiconductor using injected chargecontrast in very-slow-electron scanning electron microscope
 Mikmeková, Šárka ; Müllerová, Ilona (referee) ; Pavloušková, Zina (advisor)
This master's thesis deals with study of the injected charge contrast mechanism of doped semiconductors by using the ultra – high vacuum scanning low electron energy microscope (UHV SLEEM). The aims of this work were to explain the injected charge contrast mechanism, to ability of this contrast mechanism to map the dopant density quantitatively and to identify the influencing factors.
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Quantitative mapping of dopant in semiconductor using injected chargecontrast in very-slow-electron scanning electron microscope
 Mikmeková, Šárka ; Müllerová, Ilona (referee) ; Pavloušková, Zina (advisor)
This master's thesis deals with study of the injected charge contrast mechanism of doped semiconductors by using the ultra – high vacuum scanning low electron energy microscope (UHV SLEEM). The aims of this work were to explain the injected charge contrast mechanism, to ability of this contrast mechanism to map the dopant density quantitatively and to identify the influencing factors.
Detailed record

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